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Apr 25·edited Apr 25

Fascinating, would you agree then that each $150mn ASML machine puts out one exposure every minute per wafer at the 100W benchmark?

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the article titled[Compact SR Ring of Mitsubishi Electric Corporation](in Japanese) is published at J. Particle Accelarator Society of Japan ,vol.2.No3,2005,105. Compact SR Ring of Mitsubishi Electric Corporation is introduced for X-ray lithography .

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